• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The present invention relates to a probe sheet for inspecting a flat panel display device, a manufacturing method thereof, and a probe assembly having the same. In the probe sheet according to the present invention, a plurality of unit contacts having a bar-shaped beam portion having a meter tip integrally provided on one side under a thin film of a predetermined size is fixed with a predetermined interval and arranged to manufacture a probe sheet. The method includes forming a first passivation pattern defining a region on which a tip of a plurality of unit contacts is to be formed on a sacrificial substrate, and performing an etching process using the first passivation pattern as an etching mask. Forming a trench in the trench, removing the first passivation layer pattern, and forming a second passivation layer pattern on the sacrificial substrate from which the first passivation layer pattern is removed; Forming a beam part of the unit contact by forming a metal layer on the sacrificial substrate on which the second passivation layer pattern is formed, and forming the second passivation layer pattern The step of opening parts of the beam of the unit contact body, Slicing a sacrificial substrate having an open beam portion of the unit contact to a predetermined size, by placing a thin film of a predetermined size on the sliced sacrificial substrate to attach the beam portion of the unit contact below the thin film And a step of opening the tip of the unit contact by removing the sacrificial substrate to which the thin film is attached and fixed, wherein the probe assembly has a contact surface which is in direct contact with the inspection region of the test object. In the probe assembly for fixing a flat panel display device having a probe block to be fixed, a probe holder for fixing the probe block and a manipulator connected to the probe holder to allow the probe block to move up and down by physical force, The tip for meter reading is below the thin film of the predetermined size on the lower surface of the probe block. The bar-shaped body is a plurality of beam contact unit comprising a predetermined distance spaced attachment fixed probe sheet is further provided a provided on the opposite side of the beam having the above-mentioned metering tip is characterized in that it is connected to the TCP. Therefore, it is possible to actively cope with the fine pitch of the highly integrated flat panel display device, and has an effect of excellent reproducibility and productivity.
    公开号:KR20040044808A
    申请号:KR1020020072990
    申请日:2002-11-22
    公开日:2004-05-31
    发明作者:이억기；조병호；구철환；조용휘；이상유
    申请人:주식회사 파이컴；이억기；
    IPC主号:
    专利说明:

    Probe sheet for inspecting flat panel display device, method for manufacturing same, and probe assembly having same {probe sheet for testing flat pannel display, method thereby, probe assembly having it}
    [15] The present invention relates to a probe sheet for inspecting a flat panel display device, a method of manufacturing the same, and a probe assembly having the same, and more specifically, for inspecting a flat panel display device having excellent reproducibility and productivity by using MEMS (Micro Electro Mechanical System) technology. It relates to a probe sheet, a method for manufacturing the same and a probe assembly having the same.
    [16] In general, a TFT-LCD (Thin Film Transistor Liquid Crystal Display) is a kind of flat panel display, in which a myriad of thin film transistors (TFTs) and pixel electrodes are arranged, a lower plate having a predetermined size, a color filter for displaying color, and The common electrode is sequentially formed to have a top plate spaced apart from the bottom plate and a liquid crystal filled in the spaced space between the top plate and the bottom plate.
    [17] Such a TFT-LCD includes a charge region and an auxiliary charge region formed by a liquid crystal between a TFT, which is a switching element, and an upper and lower electrodes, and a gate driving electrode for driving on and off of the TFT and an external image signal. The predetermined screen (including a video) is turned on by the video signal electrode or the like which is applied.
    [18] After manufacturing of such a flat panel display device, such as a TFT-LCD, the electrode of the probe assembly is contacted with a pad electrode of the flat panel display device to apply an electric signal to check whether the flat display device is normal and to display a defective display device. The test process to remove the prematurely is in progress.
    [19] Such a flat panel display device is tested using a probing apparatus having a probe assembly, and the probe assembly of the probing apparatus is a needle type, a blade type, a film type, or the like. It is developed and used in various forms.
    [20] However, recently, as the flat panel display device is highly integrated, the line width of the pattern of the flat panel display device is extremely small.
    [21] Accordingly, there is an urgent need to develop a probe assembly capable of coping with fine pitch of a flat panel display device and having excellent reproducibility and productivity.
    [22] SUMMARY OF THE INVENTION An object of the present invention is to provide a probe sheet for inspecting a flat panel display device capable of actively responding to fine pitch of a flat panel display device pattern by using a MEMS process, a manufacturing method thereof, and a probe assembly having the same.
    [23] Another object of the present invention is to provide a probe sheet for inspecting a flat panel display device having excellent reproducibility and productivity by using a MEMS process, a manufacturing method thereof, and a probe assembly having the same.
    [1] 1 is a perspective view illustrating a probe sheet for inspecting a flat panel display device according to an exemplary embodiment of the present invention.
    [2] 2A to 2I are cross-sectional views illustrating a method of manufacturing a probe for inspecting a flat panel display device according to an exemplary embodiment of the present invention.
    [3] 3A is a perspective view illustrating a first probe assembly including a probe sheet for inspecting a flat panel display device according to the present invention, and FIG. 3B is a cross-sectional view.
    [4] 4A is a perspective view illustrating a second probe assembly including a probe sheet for inspecting a flat panel display device according to the present invention, and FIG. 4B is a cross-sectional view.
    [5] FIG. 5 is a view for explaining another connection relationship between a unit contact shown in FIGS. 3 and 4 and a taper package (TCP).
    [6] <Explanation of symbols for the main parts of the drawings>
    [7] 10: sacrificial substrate 12: the first protective film pattern
    [8] 14: trench 16: seed layer
    [9] 18 second protective film pattern 20 beam portion
    [10] 22: thin film 24: tip
    [11] 30 unit contact 40 probe block
    [12] 44: first interface board 48: second interface board
    [13] 52; Probe Holder 56: Menu Plate
    [14] 58: guide rail 70: fixed body
    [24] In the probe sheet for inspecting a flat panel display device according to the present invention, a plurality of unit contacts having a bar-shaped beam portion having a metering tip integrally formed on one side under a thin film of a predetermined size are fixed with a predetermined interval. It is characterized by.
    [25] A connecting tip may be further provided on the other side of the beam part, and the unit contact may be made of nickel (Ni) or a nickel alloy material.
    [26] The thin film may be made of a transparent material such as epoxy or parylene, and the thin film and the plurality of unit contacts may be attached and fixed to each other by pressing and heating.
    [27] In addition, the method of manufacturing a probe sheet according to the present invention may include forming a first passivation layer pattern defining a region where a tip of a plurality of unit contacts is to be formed on a sacrificial substrate; Forming a trench on the sacrificial substrate by performing an etching process using the first passivation layer pattern as an etching mask; Removing the first passivation layer pattern; Forming a second passivation layer pattern on a sacrificial substrate from which the first passivation layer pattern has been removed to define a region where a beam portion of a unit contact is to be formed; Forming a beam part of the unit contact by forming a metal layer on the sacrificial substrate on which the second passivation layer pattern is formed; Removing the second passivation pattern to open the beam part of the unit contact; Slicing the sacrificial substrate with the beam portion of the unit contact open to a predetermined size; Placing a thin film of a predetermined size on the sliced sacrificial substrate to fix and fix the beam part of the unit contact under the thin film; And opening the tip of the unit contact by removing the sacrificial substrate to which the thin film is attached and fixed.
    [28] The first passivation layer pattern and the second passivation layer pattern may be formed by coating a photoresist on the sacrificial substrate and exposing and developing the photoresist.
    [29] In the etching process of forming the trench, the sacrificial substrate using the chemical mixture of potassium hydroxide (KOH) and deionized water at a predetermined ratio and the sacrificial substrate on which the wet etching process is completed are SF. 6 , C 4 F 8 and O 2 gas may be made including a dry etching process using a mixed gas mixed in a certain ratio.
    [30] In addition, the metal film may be formed of nickel (Ni) or nickel alloy series by plating, and after removing the second protective film pattern to open the beam part of the unit contact, the process of cleaning the upper surface of the sacrificial substrate may be performed. May be performed further.
    [31] In addition, a transparent epoxy or parylene may be used as the thin film.
    [32] In addition, the probe assembly according to the present invention may be connected to a probe block fixed to a lower surface of a contact body directly contacting an inspection part of a test object, a probe holder fixing the probe block, and the probe holder by physical force. In a probe assembly for inspecting a flat panel display device having a manipulator for generating a vertical flow, a bar-shaped beam having a probe tip on one side of a lower surface of the probe block under a thin film of a predetermined size. A plurality of unit contacts having a portion is further provided with a probe sheet fixed with a predetermined interval arrangement, the opposite side of the beam portion provided with the metering tip is characterized in that connected to the Tape Carrier Package (TCP).
    [33] The probe block and the upper surface of the beam portion of the probe sheet may be adhesively fixed by double-sided tape or an adhesive, and the probe block may be made of a transparent material such as acrylic.
    [34] The probe block may be made of an elastic metal plate such as stainless steel.
    [35] In addition, the opposite side of the beam portion provided with the metering tip and the tape carrier package (TCP) may be connected to each other by heat compression through an AC-A (An-isotripic Conductive Film), and the opposite side of the beam portion provided with the metering tip The beam tip is further provided with a connection tip, and the connection tip and the TCP (Tape Carrier Package) may be connected to each other through a guide film.
    [36] And, the connection tip and the TCP (Tape Carrier Package) may be further provided with a physical fixing means for crimping and fixing the connection portion up and down at a portion connected to each other via a guide film (Guide film).
    [37] Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
    [38] 1 is a probe for inspecting a flat panel display device according to an embodiment of the present invention, as shown in FIG. 1, for connecting to a beam tip 20 having a bar shape and a tip 24a for metering on one side of the beam part 20. A plurality of unit contacts 30, each having a tip 24b integrally formed thereon, are arranged to be connected to each other at a predetermined interval.
    [39] In this case, the beam part 20 and the tips 24a and 24b are made of a metal material having excellent conductivity and elasticity, such as nickel (Ni) or nickel alloys (Ni-Co, Ni-W-Co), and the tip 24a. 24b is rounded so that generation of particles is suppressed.
    [40] In addition, a transparent thin film 22 of a transparent material, such as epoxy and parylene, is attached to the plurality of unit contacts 30 by pressing and heating.
    [41] Therefore, the probe sheet to which the plurality of unit contacts 30 are attached by the thin film 22 is attached to the probe assembly to test whether the flat panel display device is completed by a series of processes.
    [42] In this case, the tip 24b of the probe sheet is connected to a Tape Carrier Package (TCP) connected to a drive chip, and the tip 24a of the probe sheet is a reading part of a flat panel display device. The pad is repeatedly contacted to check whether the flat panel display device is normal.
    [43] In another embodiment, the unit contact 30 and TCP (Tape Carrier Package) in which the connection tip 24b of the beam portion 20 of the unit contact is omitted and the connection tip 24b is omitted are ACF (An It can also be connected to each other via -isotropic film.
    [44] 2A to 2I are cross-sectional views illustrating a method of manufacturing a probe for inspecting a flat panel display device according to an exemplary embodiment of the present invention.
    [45] According to the present invention, a method of manufacturing a probe for inspecting a flat panel display device may be provided on a sacrificial substrate 10 made of a material such as silicon having a certain directivity such as (1, 0, 0) as shown in FIG. 2A. In a subsequent step, the first passivation layer pattern 12 for forming the first trenches 14a and the second trenches 14b is formed.
    [46] In this case, the first passivation layer pattern 12 is made of a photoresist having excellent photosensitivity to light, and the first passivation layer pattern 12 is a photoresist having a thickness of about 2 μm on the entire surface of the substrate 10. Can be formed by spin-coating, followed by exposure and development.
    [47] Next, as shown in FIG. 2B, a first etching process is performed using the first passivation layer pattern 12 formed on the substrate 10 as an etching mask, and then spaced apart from each other on the sacrificial substrate 10 by a predetermined interval. In the process, the first trenches 14a and the second trenches 14b in which the metering tip 24a and the connecting tip 24b are to be formed are formed, respectively.
    [48] In this case, the primary etching process for forming the trenches 14a and 14b may be a wet etching process using chemicals in which potassium hydroxide (KOH) and deionized water are mixed at a predetermined ratio. By the wet etching process, the sacrificial substrate 10 having a predetermined direction is anisotropically etched to form first trenches 14a and second trenches 14b having a pyramidal or truncated cone shape.
    [49] Subsequently, as shown in FIG. 2C, a second etching process is performed using the first passivation layer pattern 12 as an etching mask, thereby forming a depth of the first trench 14a and the second trench 14b having a pyramidal or truncated cone shape. Is deeply formed and rounds the bottoms of the trenches 14a and 14b.
    [50] In this case, the secondary etching process is a dry etching process using a mixed gas in which SF 6 , C 4 F 8 and O 2 gas is mixed at a constant ratio.
    [51] In more detail, the secondary etching process is performed by a known reactive ion etching (RIE) called a Bosch process as one of the deep trench trenching methods.
    [52] In addition, the depth of the pyramidal or truncated cone-shaped trenches 14a and 14b formed by performing the primary etching process by the secondary etching process is deeply formed to 30 μm to 500 μm and the bottom part is rounded.
    [53] Subsequently, as shown in FIG. 2D, the first passivation layer pattern 12 is removed by wet etching, and then a seed layer 16 is formed on the sacrificial substrate 10 on which the secondary etching process is performed in a subsequent plating process. A copper layer functioning as to form a thickness of 2,000 kPa to 3,000 kPa.
    [54] In this case, the copper layer may be formed by a physical deposition method such as sputtering.
    [55] Next, as shown in FIG. 2E, a second passivation layer pattern 18 is formed to open an area for forming the beam part 20 in a subsequent process.
    [56] In this case, the second passivation layer pattern 18 is formed of a photoresist having excellent photosensitivity to light, similarly to the first passivation layer pattern 12, and is formed by spin coating, exposure, and developing processes.
    [57] Subsequently, as shown in FIG. 2F, after forming a metal film of a metallic material having excellent conductivity and elasticity by plating, such as nickel (Ni) or nickel alloys (Ni-Co, Ni-W-Co), etc., to a predetermined thickness, The upper surface of the sacrificial substrate 10 is planarized by chemical mechanical polishing (CMP), etchback, and grinding to form the beam part 20.
    [58] In this case, the seed layer 16 forming process used in the plating process may be omitted in the preceding process, and Ni, Ni-Co, Ni-W-Co may be omitted by a method such as CVD (chemical vapor deposition) or PVD (physical vapor deposition). The beam part 20 may be formed by forming a metal film of a material such as a predetermined thickness.
    [59] In addition, after the planarization process, the organic matter and particles existing on the sacrificial substrate 10 may be removed by additionally performing a cleaning process.
    [60] Next, as shown in FIG. 2G, after the second passivation pattern 18 is removed by wet etching, the sacrificial substrate 10 from which the second passivation pattern 18 is removed is sliced to a predetermined size.
    [61] Subsequently, a thin film 22 made of epoxy or parylene of a transparent material is placed on the sliced sacrificial substrate 10 as shown in FIG. 2H, and then pressurized and heated. (22) is attached to the upper surface of the beam portion 20 formed on the sacrificial substrate (10).
    [62] At this time, the upper portion of the beam portion 20 made of a metal film formed on the sacrificial substrate 10 by pressing and heating the thin film 22 is inserted into the thin film 22.
    [63] Lastly, as shown in FIG. 2I, the tip 24a is provided at one end of the bar-shaped beam part 20 by removing the sacrificial substrate 10 by wet etching using chemicals, and the tip for connection to the other end thereof. The probe sheet provided with 24b is completed.
    [64] Figure 3a is a perspective view for explaining a first probe assembly having a probe sheet for inspecting a flat panel display device according to the present invention described above, Figure 3b is a cross-sectional view for a detailed configuration and manufacturing method of the above-described probe sheet Omit.
    [65] 3A and 3B, a first probe assembly according to a first embodiment of the present invention includes a plurality of unit structures including a beam part 20 having a metering tip 24a and a connecting tip 24b. The probe sheet 30 attached to the transparent film 22 is fixed to the lower portion of the probe block 40.
    [66] In this case, the probe sheet and the probe block 40 are fixed to each other by attachment fixing means such as a double-sided tape or an adhesive, and the probe block 40 is made of acrylic or the like to secure transparency. It is.
    [67] In addition, the first interface board 44 is positioned on the probe block 40 and fixed to each other by fastening the fixing screw 42, and the second interface board 48 is disposed on the first interface board 44. ) And the probe holder 52 are sequentially positioned and fastened to each other by fastening the fixing screw 54.
    [68] At this time, the first interface board 44 and the second interface board 48 are fastened to each other by being fastened to each other by the fixing pin 46, and the second interface board 48 and the probe holder 52 ) Is also fastened to each other by being fastened to each other by the fixing pin (50).
    [69] In addition, the tip 24b for connecting the other end of the beam part 20 of the probe sheet is connected to a pattern embodied in TCP (Tape Carrier Package: 82) through a guide film (80).
    [70] In more detail, the probe sheet having the connection tip 24b formed thereon is positioned below the first interface board 44, and then the fixed structure is formed using the fixing body 70 and the fixing screw 72.
    [71] That is, between the probe sheet and the first interface board 44 and between the tape carrier package 82 and the fixture 70, the upper adhesive 74 and the lower adhesive 76 of an insulating ceramic material 76 are formed. Is inserted so that the tip 24b and the TCP (Tape Carrier Package) 82 of the probe sheet are connected to each other via the guide film 80 in the space between the upper adhesive 74 and the lower adhesive 76. will be.
    [72] In addition, since the fixing screw 78 is further provided on the lower side of the fixing body 70, the connecting tip 24b and the TCP 82 of the probe sheet are guided by the rotational compression of the fixing screw 78. 80) is connected to each other more firmly through the medium.
    [73] In addition, the probe holder 52 and the menu plater 56 are fastened to each other by the fixing screw 60, and the probe holder 52 connected to the menu plater 56 has an upper and lower physical force F during a test process. ) Can flow up and down.
    [74] In more detail, one side of the probe holder 52 and the other side of the menu plate 56 are fastened to each other by a guide rail 58, and the probe holder 52 and the upper and lower physical force F of the test process are fastened. The connected second interface board 48, the first interface board 44, and the probe block 40 are allowed to flow up and down.
    [75] In particular, a spring 62 having a predetermined elastic force is installed in the periphery of the fixing screw 60 connecting the probe holder 52 and the menu plate 56 to move up and down by the vertical force F of the test process. The second interface board 48, the first interface board 44, and the probe block 40 connected to the probe holder 52 are restored to their original positions by the elastic force of the spring 62.
    [76] In another embodiment, as shown in FIG. 5, the beam unit 20 and the TCP (Tape) of the probe sheet, which is not provided with a connection tip, omitting the fixture 70 provided under the first interface board 44. Carrier Package: 82) may be connected to each other by pressing and heating after placing ACF (An-isotropic Conductive Film: 90).
    [77] Therefore, after the flat panel display device manufactured by performing a series of flat panel display device manufacturing processes is moved to the probing apparatus, the probe block 40 is moved up and down by other moving means, and the predetermined electrode pad of the flat panel display device is moved. Applying a physical force (F) to perform an electrical test process for the flat panel display device.
    [78] In this case, the tip 24a of the probe sheet below the probe block 40 is in contact with the electrode pad of the flat panel display device, and the electrical signal applied from the probing device is probed through a TCP (Tape Carrier Package) 82. It is applied to the electrode pad of the flat panel display element through the beam part 20 of the sheet | seat and the metering tip 24a.
    [79] 4A is a perspective view illustrating a second probe assembly having a probe sheet for inspecting a flat panel display device according to the present invention described above, and FIG. 4B is a cross-sectional view illustrating a detailed configuration and manufacturing method of the probe sheet described above. Omit.
    [80] 4A and 4B, the second probe assembly according to the second embodiment of the present invention may have elasticity of the probe block 40 made of a transparent material under the first interface board 44 of the first probe assembly. By using the metal plate 100 made of metal such as high stainless steel, the metal plate 100 is fixed to the lower side of the first interface board 44 by the fixing screw 44 and under the metal plate 100. The probe sheet is a highly elastic rubber; It is characterized by being attached to and fixed to each other by an adhesive or the like with 102 interposed therebetween.
    [81] Therefore, when the second probe assembly according to the second embodiment performs an electrical test process for the flat panel display device while applying a predetermined physical force F to the electrode pad of the flat panel display device, the first interface board 44 The elastic force is doubled by providing the metal plate 100 and the rubber 102 of the elastic material at the bottom.
    [82] According to the present invention, a plurality of unit contacts are sacrificed by a predetermined interval by a micro electro mechanical system (MEMS) technique including a photolithography process capable of forming a pattern and a space between patterns extremely densely. By implementing on a substrate, there is an effect that can actively respond to the fine pitch of the recently integrated flat panel display device.
    [83] In addition, the use of MEMS technology has the effect of mass production of reproducible products.
    [84] Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various changes and modifications can be made within the technical spirit of the present invention, and such modifications and modifications are naturally within the scope of the appended claims.
    权利要求:
    Claims (21)
    [1" claim-type="Currently amended] A probe sheet for inspecting a flat panel display device, characterized in that a plurality of unit contacts including a bar-shaped beam unit having a metering tip integrally formed on one side under a thin film having a predetermined size are fixed with a predetermined interval.
    [2" claim-type="Currently amended] The probe sheet for inspecting a flat panel display device according to claim 1, further comprising a connection tip at the other side of the beam part.
    [3" claim-type="Currently amended] The probe sheet of claim 1, wherein the unit contact member is made of nickel (Ni) or a nickel alloy material.
    [4" claim-type="Currently amended] The probe sheet of claim 1, wherein the thin film is made of a transparent material.
    [5" claim-type="Currently amended] The probe sheet of claim 4, wherein the thin film is made of epoxy or parylene.
    [6" claim-type="Currently amended] The probe sheet according to claim 1, wherein the thin film and the plurality of unit contacts are attached and fixed to each other by pressing and heating.
    [7" claim-type="Currently amended] Forming a first passivation layer pattern on a sacrificial substrate, the first passivation layer pattern defining an area in which a tip of the plurality of unit contacts is to be formed;
    Forming a trench on the sacrificial substrate by performing an etching process using the first passivation layer pattern as an etching mask;
    Removing the first passivation layer pattern;
    Forming a second passivation layer pattern on a sacrificial substrate from which the first passivation layer pattern has been removed to define a region where a beam portion of a unit contact is to be formed;
    Forming a beam part of the unit contact by forming a metal layer on the sacrificial substrate on which the second passivation layer pattern is formed;
    Removing the second passivation pattern to open the beam part of the unit contact;
    Slicing the sacrificial substrate with the beam portion of the unit contact open to a predetermined size;
    Placing a thin film of a predetermined size on the sliced sacrificial substrate to fix and fix the beam part of the unit contact under the thin film; And
    Opening the tip of the unit contact by removing the sacrificial substrate to which the thin film is attached and fixed;
    Method of manufacturing a probe sheet for a flat panel display device characterized in that it comprises a.
    [8" claim-type="Currently amended] The method of claim 7, wherein the first protective film pattern and the second protective film pattern,
    Coating a photoresist on the sacrificial substrate; And
    Exposing and developing the photoresist;
    Method for manufacturing a probe sheet for inspecting flat panel display element, characterized in that formed by.
    [9" claim-type="Currently amended] The method of claim 7, wherein the etching process for forming the trench,
    SF 6 , C 4 F 8 and O 2 gas may be used for the wet etching process using the chemical mixed with potassium hydroxide (KOH) and deionized water at a predetermined ratio, and the sacrificial substrate for which the A method of manufacturing a probe sheet for inspecting a flat panel display device, comprising a dry etching process using a mixed gas mixed at a predetermined ratio.
    [10" claim-type="Currently amended] The method of claim 7, wherein the metal layer is formed of nickel (Ni) or a nickel alloy series by plating.
    [11" claim-type="Currently amended] The method of claim 7, wherein after removing the second protective layer pattern to open the beam part of the unit contact, the process of cleaning the upper surface of the sacrificial substrate is further performed. Way.
    [12" claim-type="Currently amended] The method of claim 7, wherein a transparent epoxy or parylene is used as the thin film.
    [13" claim-type="Currently amended] Manipulator which is connected to the probe block which is in direct contact with the test part of the test object is fixed to the lower surface, the probe holder for fixing the probe block and the probe holder is connected to the probe holder so that the vertical flow of the probe block can be caused by the physical force In the probe assembly for inspecting a flat panel display device having a (Manuplator),
    A plurality of unit contacts including a bar-shaped beam portion provided at one side of the probe block under a thin film of a predetermined size is further provided on a lower surface of the probe block, and further includes a probe sheet fixed with a predetermined interval. The opposite side of the provided beam unit is connected to the Tape Carrier Package (TCP) probe assembly for inspection.
    [14" claim-type="Currently amended] The probe assembly of claim 13, wherein the upper surface of the beam block of the probe block and the probe sheet is adhesively fixed by double-sided tape or adhesive.
    [15" claim-type="Currently amended] The probe assembly of claim 13, wherein the probe block is made of a transparent material.
    [16" claim-type="Currently amended] The probe assembly of claim 15, wherein the probe block is made of acrylic material.
    [17" claim-type="Currently amended] The probe assembly of claim 13, wherein the probe block is made of an elastic metal plate.
    [18" claim-type="Currently amended] 18. The probe assembly of claim 17, wherein the probe block is made of stainless steel.
    [19" claim-type="Currently amended] 15. The flat panel display device of claim 13, wherein the opposite side of the beam unit having the meter tip and the tape carrier package (TCP) are connected to each other by heat compression through an ACF (An-isotripic Conductive Film). Probe Assembly.
    [20" claim-type="Currently amended] 15. The method of claim 13, wherein the tip is further provided for connecting to the beam portion opposite to the beam portion having the meter tip, the connecting tip and TCP (Tape Carrier Package) is connected to each other via a guide film (Guide film) A probe assembly for inspecting a flat panel display device, characterized in that.
    [21" claim-type="Currently amended] 21. The method of claim 20, wherein the connection tip and TCP (Tape Carrier Package) is further provided with a physical fixing means for crimping and fixing the connection portion up and down at the portion connected to each other via a guide film (Guide film) as a medium A probe for inspecting a flat panel display device.
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    同族专利:
    公开号 | 公开日
    CN1714436A|2005-12-28|
    KR100474420B1|2005-03-10|
    CN100343967C|2007-10-17|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    2002-11-22|Application filed by 주식회사 파이컴, 이억기
    2002-11-22|Priority to KR20020072990A
    2003-11-21|Priority claimed from AU2003282421A
    2004-05-31|Publication of KR20040044808A
    2005-03-10|Application granted
    2005-03-10|Publication of KR100474420B1
    优先权:
    申请号 | 申请日 | 专利标题
    KR20020072990A|KR100474420B1|2002-11-22|2002-11-22|Probe sheet for testing flat pannel display, method thereby, probe assembly having it|
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